Vacuum Coupling
Vacuum Coupling Radiation Type Fittings, Metal Gasket Fittings and Valves
Diaphragm Valves
| Pressure Rating: | Vacuum to 207 bar (3000 psig) |
|---|---|
| Flow Rate Cv | 0.26 to 0.65 |
| Working Temperature: | -23 ℃ to 150 ℃ |
| Port Sizes: | 1/4″ to 1/2″, 6 mm to 12 mm |
| End Connection Type: | MR Face Seal Connection, Butt Weld Connection, Tube End Connection |
| Actuator Type: | Manual or Pneumatic |
| Helium Leak Rate: | Inboard Leak Rate: ≤5×10-10 std cm3/s Outboard Leak Rate: ≤5×10-10 std cm3/s Seat Leak Rate: ≤1×10-9 std cm3/s |
Pressure Regulators
| Pressure Rating: | 241 bar (3500 psig) |
|---|---|
| Flow Rate Cv | 0.06, 0.15 |
| Working Temperature: | -40 ℃ to 150 ℃ |
| Port Sizes: | 1/4″ to 1/2″, 6 mm to 12 mm |
| End Connection Type: | MR Face Seal Connection, Butt Weld Connection, Tube End Connection |
| Standard Surface Roughness: | Ra 10 μin. (0.25 μm) or Ra 5 μin. (0.13 μm) |
| Helium Leak Rate: | Outboard Leak Rate: ≤1×10-9 std cm3/s Seat Leak Rate: ≤5×10-8 std cm3/s |
Bellow-sealed Valves
| Pressure Rating: | Manual 34.4 bar (500 psig), Pneumatic 10.0 bar (145 psig) |
|---|---|
| Flow Rate Cv | 0.30 to 0.80 |
| Working Temperature: | -23 ℃ to 204 ℃ |
| Port Sizes: | 1/4″ to 1/2″, 6 mm to 12 mm |
| End Connection Type: | MR Face Seal Connection, Butt Weld Connection, Tube End Connection |
| Actuator Type: | Manual or Pneumatic |
| Helium Leak Rate: | Inboard Leak Rate: ≤4×10-9 std cm3/s Seat Leak Rate: ≤4×10-9 std cm3/s Outboard Leak Rate: ≤4×10-9 std cm3/s |
Bellow-sealed Metering Valves
| Pressure Rating: | 48.2 bar (700 psig) |
|---|---|
| Flow Rate Cv | 0.019 to 0.30 |
| Working Temperature: | 482 ℃ |
| Port Sizes: | 1/4″ to 1/2″, 6 mm to 12 mm |
| End Connection Type: | MR Face Seal Connection, Butt Weld Connection, Tube End Connection |
| Stem Type: | Regulating or Metering |
| Helium Leak Rate: | Outboard Leak Rate: ≤4×10-9 std cm3/s Seat Leak Rate: ≤7×10-7 std cm3/s |
Check Valves
| Pressure Rating: | 207 bar (3000 psig) |
|---|---|
| Flow Rate Cv | 0.55 to 0.70 |
| Working Temperature: | -23 ℃ to 204 ℃ |
| Port Sizes: | 1/4″ to 1/2″, 6 mm to 12 mm |
| End Connection Type: | MR Face Seal Connection, Butt Weld Connection, Tube End Connection |
| Cracking Pressure: | Lower than 0.14 bar (2 psig) |
| Weld and Springless Construction Standard Surface Roughness: | Lower than 0.14 bar (2 psig) |
Check Valves
| Pressure Rating: | 414 bar (6000 psig) Optional cracking pressures Applicable to gas/liquid phase medium |
|---|---|
| End Connection Type: | twin ferrule, threaded and welded Permanent traceable identification marked on each valve |
IGS Integrated Gas Systems
Modular design, all components are surface mounted in accordance with SEMI standard The size is about 1/3 the traditional panel, and the corresponding flow path size is also reduced for better contamination control The wetted components are all 316LVIM-VAR austenitic stainless steel, the flow paths are all electro polished (Ra 0.13), and the fittings are all orbital welded
Face Seal Fittings
Metal to metal seal to provide perfect leak-tight service for work conditions from vacuum to high pressure.
Standard surface roughness finished to an average of Ra 10 μin. (0.25 μm) or electropolished to Ra 5 μin. (0.13 μm)
Test port at nut for easy leak testing
Silver plated female threads to prevent galling and ensure easy and consistent assembly
Permanent traceable identification marked on each fitting
Weld Fittings
Precision machined to match tube diameter.
Burr-free tube ends to enhance alignment.
Elbows with radius junction to provide smooth flow path.
100% visual inspection on key parts under magnifier and good light conditions.
Standard surface roughness finished to an average of Ra 10 μin. (0.25 μm) or electropolished to Ra 5 μin. (0.13 μm).
Permanent traceable identification marked on each fitting.
Size Range: 1/8″ to 1/2″, 6 mm to 12 mm
Tubular Weld Fittings
Precision machined to match tube diameter.
Burr-free tube ends to enhance alignment.
100% visual inspection on key parts under magnifier and good light conditions.
Standard surface roughness finished to an average of Ra 10 μin. (0.25 μm) or electropolished to Ra 5 μin. (0.13 μm).
Permanent traceable identification marked on each fitting.
Size Range: 1/4″ to 2″
General Fittings
| Types available: | twin ferrule, threaded and welded |
|---|---|
| Sizes: | 2 mm to 38 mm, or 1/8″ to 2″ |
| Materials: | 316SS, Monel, etc. Elbows with radius junction to provide smooth flow path Silver plated female threads to prevent galling and ensure easy and consistent assembly Permanent traceable identification marked on each fitting |
Ball Valves
Pressure Rating: 690 bar (10000 psig)
Floating ball or fixed ball type available
Blowout proof stem design
Handle as indicator of flow path
Manual, pneumatic or electric actuator available
Leak-tight testing with nitrogen at the rated pressure (≤6000 psig) to meet the requirement of no visible leak
Permanent traceable identification marked on each valve
Needle Valves
Pressure Rating: 414 bar (6000 psig) Element Sizes: 0.5 to 450 μm Body Material: 316 SS, etc. In-line type, Bypass type and Tee type available End Connection Type: twin ferrule, threaded and welded Permanent traceable identification marked on each valve Size Ranges: 1/8″ to 1/2″, 6 mm to 12 mm
Filter
| Pressure Rating: | 414 bar (6000 psig) |
|---|---|
| Element Sizes: | 2 mm to 38 mm, or 1/8″ to 2″ |
| Body Material: | 316 SS, etc. In-line type, Bypass type and Tee type available |
| Body Material: | 316 SS, etc. In-line type, Bypass type and Tee type available |
| End Connection Type: | twin ferrule, threaded and welded Permanent traceable identification marked on each valve |
| Size Ranges: | 1/8″ to 1/2″, 6 mm to 12 mm |
Manifolds
| Pressure Rating: | 690 bar (10000 psig) 2-valve, 3-valve and 5-valve manifolds available Direct connection and remote connection available |
|---|---|
| Standard Orifice: | 4.0 mm Two-piece stem design, minimizes packing abrasion and reduces the friction between the seat and the tip. Safety back seating seal in fully open position |
High Pressure Fittings
| Pressure Rating: | 4137 bar (60000 psig) |
|---|---|
| Temperature Range: | -252 ℃ to 649 ℃ (-423 ℉ to 1200 ℉) High tensile 316 stainless steel material as standard Elbows with radius junction to provide smooth flow path Union, Elbow, Tee and Cross available Permanent traceable identification marked on each fitting |
High Pressure Valves
Pressure Rating: 4137 bar (60000 psig) Needle valve, ball valve, check valve, filter and relief valve are available A variety of flow path options Different ports sizes and types available Permanent traceable identification marked on each valve Pneumatic actuator is available for some configurations
Sub-sea Valves
Pressure Rating: 1379 bar (20000 psig) Sub-sea needle valve, ball valve, check valve and directional valve available A variety of flow path options Different ports sizes and types available Permanent traceable identification marked on each valve Hydraulic actuator is available for some configurations Max. water depth: 4200 m (13800 ft.)